The electrical and optical properties of doped BTO thin films

Zhipeng Liu; Zhenlun Zhang; Gang Sheng; Pingxiong Yang; Junhao Chu

doi:10.1117/12.841596

12 October 2009 The electrical and optical properties of doped BTO thin films

Zhipeng Liu, Zhenlun Zhang, Gang Sheng, Pingxiong Yang, Junhao Chu

Proceedings Volume 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies; 751812 (2009) https://doi.org/10.1117/12.841596
Event: Photonics and Optoelectronics Meetings 2009, 2009, Wuhan, China

Abstract

BaTiO3 thin films with different dopants of Fe and Co were prepared by sol-gel technique on Si and LaNiO3 coating Si substrates respectively. The x-ray diffraction patterns showed that all the films were perovskite structure and the change of lattice constant caused by dopants was undetectable. Atomic Force Microscope (AFM) was used to characterize the surface morphology of the thin films. The surfaces of films were uniform and dense except Co-doped BaTiO₃ film on Si substrate. The Raman spectra showed the Fe dopant could improve the crystal quality of BTO films on these two different substrates. The results of UV reflectance for BTO thin films prepared on Si substrates showed that the reflectance peaks of Fe-doped BTO film moved to the low frequency. The Pt top electrodes were fabricated on BaTiO₃/LaNiO₃/Si to form a metal-ferroelectrics-metal structure and the dielectric properties of the thin films were carried out by impedance analyzer. It was found that Co dopant could increase the dielectric constant of BTO film to some extent and the Fe dopant could decrease the dielectric constant of film below 30 kHz. Both of the dopants could increase the dielectric loss of the films with the frequency increasing.

Citation Download Citation

Zhipeng Liu, Zhenlun Zhang, Gang Sheng, Pingxiong Yang, and Junhao Chu "The electrical and optical properties of doped BTO thin films", Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 751812 (12 October 2009); https://doi.org/10.1117/12.841596

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