Study and considerations of nanometer and nano-radian surface profiler

Shinan Qian; Kun Qian

doi:10.1117/12.871258

11 October 2010 Study and considerations of nanometer and nano-radian surface profiler

Shinan Qian, Kun Qian

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76560D (2010) https://doi.org/10.1117/12.871258
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A Nanometer and Nano-radian Surface Profiler (NSP) is under development at Brookhaven National Laboratory. Nanometer and nano-radian accuracy is required for newest state-of-the-art synchrotron radiation optics and highprecision optical measurement. This test accuracy must be maintained in larger angle test range. In order to reach this accuracy we have to remove all error sources as much as possible or to reduce them to nano-radian level. We present the approaches in optimized optical system designing, scanning optical head mode selection, non-tilted reference method, quality control of optical components, and temperature stabilization. Some considerations and preliminary measurements are presented.

Citation Download Citation

Shinan Qian and Kun Qian "Study and considerations of nanometer and nano-radian surface profiler", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560D (11 October 2010); https://doi.org/10.1117/12.871258

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