Fabrication 3D buried channel optical waveguide modulators on field-driven ion exchange process

Zigang Zhou; Wenqiang Chen; Li Zhu; Jing Li; Xiaoying Luo

doi:10.1117/12.863592

11 October 2010 Fabrication 3D buried channel optical waveguide modulators on field-driven ion exchange process

Zigang Zhou, Wenqiang Chen, Li Zhu, Jing Li, Xiaoying Luo

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 765621 (2010) https://doi.org/10.1117/12.863592
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A high electric field technique was developed to fabricate buried optical waveguide modulator on K9 optical glass. The 80V voltage was applied on the glass to accelerate the field-driven ion exchange process by expeditiously replacing host sodium ions in the glass with silver ions. As a result, the optical loss for optical waveguide modulator was measured using the edge coupling technique with a 0.6328μm He-Ne laser. Loss of 0.20 dB/cm was obtained for channel waveguides of 25μm in depth, relatively low for waveguides of such depth at red wavelength.

Citation Download Citation

Zigang Zhou, Wenqiang Chen, Li Zhu, Jing Li, and Xiaoying Luo "Fabrication 3D buried channel optical waveguide modulators on field-driven ion exchange process", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 765621 (11 October 2010); https://doi.org/10.1117/12.863592

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