Improved zone-plate interferometer for measuring aspheric surface

Liang Nie; Gang Wang; Guiqin Quan

doi:10.1117/12.866157

12 October 2010 Improved zone-plate interferometer for measuring aspheric surface

Liang Nie, Gang Wang, Guiqin Quan

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76566C (2010) https://doi.org/10.1117/12.866157
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

The creation of referring wavefronts for the measuring aspheric surface is a challenge in the field of optical measurement at present. The improved zone-plate interferometer is proposed to solve the problem in this paper. The principle of zone plate interferometer is discussed and the theory modal is analyzed. The structure of the interferometer is designed and slightly different from that of the Smartt zone plate interferometers. A new computer generated hologram (CGH) zoneplate is designed and manufactured, which acts as null optical element in the interferometer. The corresponding experimental system is built and the interferograms are processed with fast Fourier transform (FFT), phase unwrapping and surface fitting algorithm. Theoretical analysis and experiment results indicate it achieves worthy measurement precision.

Citation Download Citation

Liang Nie, Gang Wang, and Guiqin Quan "Improved zone-plate interferometer for measuring aspheric surface", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76566C (12 October 2010); https://doi.org/10.1117/12.866157

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