Paper
5 May 2010 Nanocrossbar arrays as molecular sensors
Nicholas Prokopuk, Kyung-Ah Son
Author Affiliations +
Abstract
Electron tunneling between nanospaced electrodes provides a mechanism for directly transducing the presence of molecular analytes into electrical signals. Crossbar junctions with vertical separations on the order of a few nanometers were fabricated using a combination of electron-beam lithography and selective chemical etching. The current-voltage properties of the nanojunctions are highly sensitive to the chemical environment. The tunneling currents increase over one order of magnitude in response to water and organic vapors diluted with a background of pure nitrogen. The resistance of the junctions is also dependent on the concentration of the analyte. These results demonstrate that tunneling can be used to detect changes in the chemical environment.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nicholas Prokopuk and Kyung-Ah Son "Nanocrossbar arrays as molecular sensors", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791C (5 May 2010); https://doi.org/10.1117/12.851308
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KEYWORDS
Sensors

Gold

Electrodes

Nitrogen

Chromium

Chemical analysis

Wet etching

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