Paper
28 April 2010 High-efficiency integrated piezoelectric energy harvesting systems
Abhiman Hande, Pradeep Shah
Author Affiliations +
Abstract
This paper describes hierarchically architectured development of an energy harvesting (EH) system that consists of micro and/or macro-scale harvesters matched to multiple components of remote wireless sensor and communication nodes. The micro-scale harvesters consist of thin-film MEMS piezoelectric cantilever arrays and power generation modules in IC-like form to allow efficient EH from vibrations. The design uses new high conversion efficiency thin-film processes combined with novel cantilever structures tuned to multiple resonant frequencies as broadband arrays. The macro-scale harvesters are used to power the collector nodes that have higher power specifications. These bulk harvesters can be integrated with efficient adaptive power management circuits that match transducer impedance and maximize power harvested from multiple scavenging sources with very low intrinsic power consumption. Texas MicroPower, Inc. is developing process based on a composition that has the highest reported energy density as compared to other commercially available bulk PZT-based sensor/actuator ceramic materials and extending it to thin-film materials and miniature conversion transducer structures. The multiform factor harvesters can be deployed for several military and commercial applications such as underground unattended sensors, sensors in oil rigs, structural health monitoring, supply chain management, and battlefield applications such as sensors on soldier apparel, equipment, and wearable electronics.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Abhiman Hande and Pradeep Shah "High-efficiency integrated piezoelectric energy harvesting systems", Proc. SPIE 7683, Energy Harvesting and Storage: Materials, Devices, and Applications, 76831B (28 April 2010); https://doi.org/10.1117/12.850193
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KEYWORDS
Sensors

Transducers

Energy harvesting

Thin films

Wind energy

Magnetic sensors

Telecommunications

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