Micro-retroreflector array fabricated by the LIGA process

Jürgen Jahns; Thomas Seiler; Jürgen Mohr D.D.S.; Martin Börner

doi:10.1117/12.854710

14 May 2010 Micro-retroreflector array fabricated by the LIGA process

Jürgen Jahns, Thomas Seiler, Jürgen Mohr D.D.S., Martin Börner

Proceedings Volume 7716, Micro-Optics 2010; 77162H (2010) https://doi.org/10.1117/12.854710
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We report on the fabrication of a one-dimensional micro-retroreflector array with a pitch of 100 micrometers. The array was fabricated by X-ray lithography and the LIGA process in a 1 mm thick PMMA layer and subsequently covered with Au. The area of the array is 1 mm x 10 mm. The high precision of the LIGA-based fabrication process allows one to use the element in spectrometers. Here, it is suggested to use it for the implementation of a transversal filter for femto-second pulses.

Citation Download Citation

Jürgen Jahns, Thomas Seiler, Jürgen Mohr D.D.S., and Martin Börner "Micro-retroreflector array fabricated by the LIGA process", Proc. SPIE 7716, Micro-Optics 2010, 77162H (14 May 2010); https://doi.org/10.1117/12.854710

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