The simulation of growth thermodynamics in the synthesis of GaN1-xPx alloys

K. X. Zhang; D. W. Huang; H. Y. Xie; Y. Xu; J. F. Gong; W. H. Zhu

doi:10.1117/12.869697

21 July 2010 The simulation of growth thermodynamics in the synthesis of GaN_1-xP_x alloys

K. X. Zhang, D. W. Huang, H. Y. Xie, Y. Xu, J. F. Gong, W. H. Zhu

Proceedings Volume 7749, 2010 International Conference on Display and Photonics; 774906 (2010) https://doi.org/10.1117/12.869697
Event: 2010 International Conference on Display and Photonics, 2010, Nanjing, China

Abstract

In this paper, thermodynamics method was used to calculate the growth of GaN_1-xP_x ternary alloys on (0001) GaN/sapphire substrates and the solubility of phosphorus in GaN by using the Gibbs free energy theory was calculated. The calculated results show that great deviation from linearity between the input mole ratio R and the equilibrium partial pressures, and the content of P in GaN varies with the growth temperature and the boundary of the spinodal isotherm shifts from x=0.06 to x=0.25 at the growth temperature of 1200K as the strain factor increases from 0 to 1, indicating that the strain in the GaN_1-xP_x layers can suppress the phase separation. Meanwhile, with the increase of the effective elastic parameters of GaN and GaP, the available maximum P content also increases slightly at the growth temperature.

Citation Download Citation

K. X. Zhang, D. W. Huang, H. Y. Xie, Y. Xu, J. F. Gong, and W. H. Zhu "The simulation of growth thermodynamics in the synthesis of GaN_1-xP_x alloys", Proc. SPIE 7749, 2010 International Conference on Display and Photonics, 774906 (21 July 2010); https://doi.org/10.1117/12.869697

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available