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An advanced fiber point diffraction interferometer (FPDI) for measuring spherical surface has been developed. It is
designed for measuring EUV spherical mirrors with high precision. The quality of the diffraction wavefront, which acts
as the referenced wave in the FPDI, is crucial for the measurement accuracy. To estimate the accuracy of FPDI, the
theory model for an optical fiber point diffraction source is presented and then numerical calculation is used for analysis.
Several key techniques are proposed and analyzed, such as design of short coherence length laser source and interference
image processing. The laboratory apparatus has been put up to measure spherical surface in experiment. The results
show that the interferometer has achieved worthy measurement precision and has great development potential.
Nie Liang,Mengmeng Hu,Baoyuan Liu, andCunli Duan
"Fiber point diffraction interferometer for measuring spherical surface", Proc. SPIE 7749, 2010 International Conference on Display and Photonics, 77490B (21 July 2010); https://doi.org/10.1117/12.869374
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Nie Liang, Mengmeng Hu, Baoyuan Liu, Cunli Duan, "Fiber point diffraction interferometer for measuring spherical surface," Proc. SPIE 7749, 2010 International Conference on Display and Photonics, 77490B (21 July 2010); https://doi.org/10.1117/12.869374