Paper
18 February 2011 Growth and UV detectors application of ZnMgO films
Ke Tang, Jian Huang, Qinkai Zeng, Jijun Zhang, Weimin Shi, Yiben Xia, Linjun Wang
Author Affiliations +
Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79952Z (2011) https://doi.org/10.1117/12.888372
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China
Abstract
ZnMgO films were prepared at room temperature on freestanding diamond (FSD) substrates by co-sputtering with different sputtering power of MgO target. The effect of sputtering power of MgO target on the property of ZnMgO films was investigated. The PL spetra of ZnMgO films revealed that the bandgap of ZnMgO was approximately linear related to the sputtering power of MgO target. The ZnMgO film was also applied to be fabricating UV detectors. Finally, we studied the photoelectric property of the UV detector.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ke Tang, Jian Huang, Qinkai Zeng, Jijun Zhang, Weimin Shi, Yiben Xia, and Linjun Wang "Growth and UV detectors application of ZnMgO films", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952Z (18 February 2011); https://doi.org/10.1117/12.888372
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KEYWORDS
Sputter deposition

Ultraviolet detectors

Diamond

Zinc oxide

Gold

Electrodes

Ultraviolet radiation

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