Research on the property of electro-deposited Ni-Fe-SiC alloy for MEMS

Xiaohu Zheng; Feng Gu

doi:10.1117/12.907055

28 November 2011 Research on the property of electro-deposited Ni-Fe-SiC alloy for MEMS

Xiaohu Zheng, Feng Gu

Proceedings Volume 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology; 820214 (2011) https://doi.org/10.1117/12.907055
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

Electrolytic codeposition technique was adopted in the deposition of Ni-Fe-SiC composite coating on stainless steel substrate, using nickel alloyed with iron as the binder phase with SiC as dispersed particles. The results indicated that the deposit with SiC nanoparticles was level and compact; the crystal-planes of the deposit were (111), (220) and (200). The resistivity of deposit was about 30μΩ•cm. when the Fe(wt.%) ranged from 10% to 50% in the deposit, the electrodeposit Ni-20%Fe-SiC has a strong paramagnetism effect with the smallest coercivity of 2.75×10^-2 A/m. The remanence showed a monotonic decrease with the increasing iron content in deposit. Which proved that the electroformed Ni-Fe-SiC alloy has good electromagnetic property and higher corrosion resistance (with the corrosion rate 0.17 mg/dm² per hour) than those of electroforming Ni-Fe alloy. It is a promising material in the fabrication of micro actuator.

Citation Download Citation

Xiaohu Zheng and Feng Gu "Research on the property of electro-deposited Ni-Fe-SiC alloy for MEMS", Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 820214 (28 November 2011); https://doi.org/10.1117/12.907055

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