High yield silicon photonic crystal microcavity biosensors with 100fM detection limit

Yi Zou; Swapnajit Chakravarty; Wei-Cheng Lai; Cheng-Chih Hsieh; Ray T. Chen

doi:10.1117/12.2005149

5 March 2013 High yield silicon photonic crystal microcavity biosensors with 100fM detection limit

Yi Zou, Swapnajit Chakravarty, Wei-Cheng Lai, Cheng-Chih Hsieh, Ray T. Chen

Proceedings Volume 8570, Frontiers in Biological Detection: From Nanosensors to Systems V; 857008 (2013) https://doi.org/10.1117/12.2005149
Event: SPIE BiOS, 2013, San Francisco, California, United States

Abstract

We experimentally demonstrated a silicon photonic crystal (PC) microcavity biosensor with 50 femto-molar detection limit. Our devices have demonstrated sensitivities higher than than competing optical platforms at concentration of 0.1μg/ml across a range of dissociation constants KD 1 micro-molar to 1 femto-molar. High sensitivities were achieved by slow light engineering which reduced the radiation loss and increased the stored energy in the PC microcavity resonance mode which contributed to high Q as well as enhanced optical mode overlap with the analyte. By integrating subwavelength grating coupler, we showed that not only coupling efficiency increased but also the working device yield significantly improved

Citation Download Citation

Yi Zou, Swapnajit Chakravarty, Wei-Cheng Lai, Cheng-Chih Hsieh, and Ray T. Chen "High yield silicon photonic crystal microcavity biosensors with 100fM detection limit", Proc. SPIE 8570, Frontiers in Biological Detection: From Nanosensors to Systems V, 857008 (5 March 2013); https://doi.org/10.1117/12.2005149

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