Study of photoresponsivity in optoelectronic devices based on single crystal β-Ga2O3 epitaxial layers

Ray-Hua Horng; Parvaneh Ravadgar

doi:10.1117/12.2002441

18 March 2013 Study of photoresponsivity in optoelectronic devices based on single crystal β-Ga₂O₃ epitaxial layers

Ray-Hua Horng, Parvaneh Ravadgar

Proceedings Volume 8626, Oxide-based Materials and Devices IV; 86260D (2013) https://doi.org/10.1117/12.2002441
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

Single crystal β-Ga₂O₃ epitaxial layers have been prepared on c-axis (0001) sapphire substrates using metalorganic chemical vapor deposition technique at relatively low temperature. Post-annealing of β-Ga₂O₃ single crystals up to 800 °C does not affect the crystallinity, explored by x-ray diffraction, showing that β-Ga₂O₃ epitaxial layers are highly (-201) oriented. Metal-semiconductor-metal devices are fabricated on single crystals to study their photoresponsivity. A significant improvement in performance of post annealed-based devices is observed, attributed to point defect reduction. Annealing of as-grown samples results to a significant decrease in both oxygen and gallium vacancies, which are sources of current leakage.

Citation Download Citation

Ray-Hua Horng and Parvaneh Ravadgar "Study of photoresponsivity in optoelectronic devices based on single crystal β-Ga₂O₃ epitaxial layers", Proc. SPIE 8626, Oxide-based Materials and Devices IV, 86260D (18 March 2013); https://doi.org/10.1117/12.2002441

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available