Self-aligned double patterning friendly configuration for standard cell library considering placement impact

Jhih-Rong Gao; Bei Yu; Ru Huang; David Z. Pan

doi:10.1117/12.2011660

29 March 2013 Self-aligned double patterning friendly configuration for standard cell library considering placement impact

Jhih-Rong Gao, Bei Yu, Ru Huang, David Z. Pan

Author Affiliations +

Proceedings Volume 8684, Design for Manufacturability through Design-Process Integration VII; 868406 (2013) https://doi.org/10.1117/12.2011660
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Self-aligned double patterning (SADP) has become a promising technique to push pattern resolution limit to sub-22nm technology node. Although SADP provides good overlay controllability, it encounters many challenges in physical design stages to obtain conflict-free layout decomposition. In this paper, we study the impact on placement by different standard cell layout decomposition strategies. We propose a SADP friendly standard cell configuration which provides pre-coloring results for standard cells. These configurations are brought into the placement stage to help ensure layout decomposability and save the extra effort for solving conflicts in later stages.

Citation Download Citation

Jhih-Rong Gao, Bei Yu, Ru Huang, and David Z. Pan "Self-aligned double patterning friendly configuration for standard cell library considering placement impact", Proc. SPIE 8684, Design for Manufacturability through Design-Process Integration VII, 868406 (29 March 2013); https://doi.org/10.1117/12.2011660

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