Paper
7 May 2013 Group IV platforms for the mid-infrared
G. Z. Mashanovich, M. Nedeljkovic, X. Chen, T. M. Ben Masaud, M. Muneeb, M. Strain, M. Sorel, T. F. Krauss, G. C. Roelkens, A. C. Peacock, H. M. H. Chong, G. T. Reed
Author Affiliations +
Abstract
We have investigated several material platforms for the mid-infrared including silicon on insulator (SOI), polycrystalline silicon, and suspended silicon structures. We review photonic devices based on these platforms including splitters, ring/racetrack resonators, Mach-Zehnder interferometers, and spectrometers.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. Z. Mashanovich, M. Nedeljkovic, X. Chen, T. M. Ben Masaud, M. Muneeb, M. Strain, M. Sorel, T. F. Krauss, G. C. Roelkens, A. C. Peacock, H. M. H. Chong, and G. T. Reed "Group IV platforms for the mid-infrared", Proc. SPIE 8781, Integrated Optics: Physics and Simulations, 87810V (7 May 2013); https://doi.org/10.1117/12.2018280
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KEYWORDS
Waveguides

Silicon

Mid-IR

Etching

Resonators

Wave propagation

Mach-Zehnder interferometers

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