Design of a micromachined terahertz electromagnetic crystals (EMXT) channel-drop filter on silicon-substrate

Kai Zhou; Yong Liu; Liming Si; Xin Lv

doi:10.1117/12.2032487

23 August 2013 Design of a micromachined terahertz electromagnetic crystals (EMXT) channel-drop filter on silicon-substrate

Kai Zhou, Yong Liu, Liming Si, Xin Lv

Author Affiliations +

Proceedings Volume 8909, International Symposium on Photoelectronic Detection and Imaging 2013: Terahertz Technologies and Applications; 890907 (2013) https://doi.org/10.1117/12.2032487
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China

Abstract

An integrated 0.5 THz electromagnetic crystals(EMXT) channel-drop filter based on PBG structure is presented in this paper. A channel-drop filter is a device in which a narrow bandwidth is redirected to another “drop” waveguide while other frequencies are unaffected. It’s capable of extracting a certain frequency from a continuous spectrum in the bus channel and passing it to the test channel. It has potential applications in photonic integrated circuits, radio astronomy, THz spectroscopy, THz communication and remote sensing radar receiver. PBG structures(or photonic crystals) are periodic structures which possess band gaps, where the electromagnetic wave of certain ranges of frequencies cannot pass through and is reflected. The proposed channel-drop filter consists of input waveguide,output waveguide and PBG structure. The proposed filter is simulated using the finite element method and can be fabricated by micro-electromechanical systems (MEMS) technology,due to its low cost, high performance and high processing precision.The filter operation principle and fabrication process are discussed.The simulation results show its ability to filter the frequency of 496GHz with a linewidth of approximately 4GHz and transmission of 27.2 dB above background.The loss at resonant frequency is less than 1dB considering the thickness and roughness of gold layer required by the MEMS process.The channel drop efficiency is 84%.

Citation Download Citation

Kai Zhou, Yong Liu, Liming Si, and Xin Lv "Design of a micromachined terahertz electromagnetic crystals (EMXT) channel-drop filter on silicon-substrate", Proc. SPIE 8909, International Symposium on Photoelectronic Detection and Imaging 2013: Terahertz Technologies and Applications, 890907 (23 August 2013); https://doi.org/10.1117/12.2032487

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KEYWORDS

Waveguides

Photonic crystals

Microelectromechanical systems

Terahertz radiation

Electromagnetism

Silicon

Crystals

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