Design, fabrication, and characterization of InSb avalanche photodiode

J. Abautret; A. Evirgen; J. P. Perez; P. Christol; A. Rouvié; R. Cluzel; A. Cordat; J. Rothman

doi:10.1117/12.2039011

31 January 2014 Design, fabrication, and characterization of InSb avalanche photodiode

J. Abautret, A. Evirgen, J. P. Perez, P. Christol, A. Rouvié, R. Cluzel, A. Cordat, J. Rothman

Proceedings Volume 8993, Quantum Sensing and Nanophotonic Devices XI; 899314 (2014) https://doi.org/10.1117/12.2039011
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

In this communication, the potentiality of InSb material as an avalanche photodiode (APD) device is investigated. Current density-voltage (J-V) characteristics at 77K of InSb pin photodiodes were simulated by using ATLAS software from SILVACO, in dark conditions and under illumination. In order to validate parameter values used for the modeling, theoretical J-V results were compared with experimental measurements performed on InSb diodes fabricated by molecular beam epitaxy. Next, assuming a multiplication process only induced by the electrons (e-APD), different designs of separate absorption and multiplication (SAM) APD structure were theoretically investigated and the first InSb SAM APD structure with 1μm thick multiplication layer was then fabricated and characterized.

Citation Download Citation

J. Abautret, A. Evirgen, J. P. Perez, P. Christol, A. Rouvié, R. Cluzel, A. Cordat, and J. Rothman "Design, fabrication, and characterization of InSb avalanche photodiode", Proc. SPIE 8993, Quantum Sensing and Nanophotonic Devices XI, 899314 (31 January 2014); https://doi.org/10.1117/12.2039011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available