Microplasma fabrication: from semiconductor technology for 2D-chips and microfluidic channels to rapid prototyping and 3D-printing of microplasma devices

R. Shatford; Vassili Karanassios

doi:10.1117/12.2050538

22 May 2014 Microplasma fabrication: from semiconductor technology for 2D-chips and microfluidic channels to rapid prototyping and 3D-printing of microplasma devices

R. Shatford, Vassili Karanassios

Author Affiliations +

Proceedings Volume 9106, Advanced Environmental, Chemical, and Biological Sensing Technologies XI; 91060H (2014) https://doi.org/10.1117/12.2050538
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

Microplasmas are receiving attention in recent conferences and current scientific literature. In our laboratory, microplasmas-on-chips proved to be particularly attractive. The 2D- and 3D-chips we developed became hybrid because they were fitted with a quartz plate (quartz was used due to its transparency to UV). Fabrication of 2D- and 3D-chips for microplasma research is described. The fabrication methods described ranged from semiconductor fabrication technology, to Computer Numerical Control (CNC) machining, to 3D-printing. These methods may prove to be useful for those contemplating in entering microplasma research but have no access to expensive semiconductor fabrication equipment.

Citation Download Citation

R. Shatford and Vassili Karanassios "Microplasma fabrication: from semiconductor technology for 2D-chips and microfluidic channels to rapid prototyping and 3D-printing of microplasma devices", Proc. SPIE 9106, Advanced Environmental, Chemical, and Biological Sensing Technologies XI, 91060H (22 May 2014); https://doi.org/10.1117/12.2050538

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