Interferometric sensors based on sinusoidal optical path length modulation

Holger Knell; Markus Schake; Markus Schulz; Peter Lehmann

doi:10.1117/12.2051508

1 May 2014 Interferometric sensors based on sinusoidal optical path length modulation

Holger Knell, Markus Schake, Markus Schulz, Peter Lehmann

Proceedings Volume 9132, Optical Micro- and Nanometrology V; 91320I (2014) https://doi.org/10.1117/12.2051508
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

Sinusoidal optical path length modulation of the reference or the measurement arm of an interferometer is a technique which is a fast alternative to white light or phase shifting interferometry. In this paper three different sensors using this periodical modulation are presented. In addition, signal processing algorithms based on Discrete Fourier Transform, Hilbert Transform and parameter estimation are analyzed. These algorithms are used to obtain measurement results which demonstrate the capabilities of the presented interferometric sensors.

Citation Download Citation

Holger Knell, Markus Schake, Markus Schulz, and Peter Lehmann "Interferometric sensors based on sinusoidal optical path length modulation", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91320I (1 May 2014); https://doi.org/10.1117/12.2051508

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