Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy

S. Matsuyama; Y. Emi; H. Kino; Y. Kohmura; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.2060783

5 September 2014 Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy

S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Author Affiliations +

Proceedings Volume 9207, Advances in X-Ray/EUV Optics and Components IX; 92070Q (2014) https://doi.org/10.1117/12.2060783
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

An achromatic and high-resolution hard X-ray microscope was developed, in which advanced Kirkpatrick-Baez mirror optics with four total-reflection mirrors was employed as an objective. A fine test pattern with a 100 nm feature size could successfully be resolved. Full-field imaging, in combination with X-ray absorption near edge structure (XANES) spectroscopy, was used to characterize tungsten particles. XANES spectra were obtained over the entire observation area, showing good agreement with the XANES spectrum of pure tungsten.

Citation Download Citation

S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy", Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 92070Q (5 September 2014); https://doi.org/10.1117/12.2060783

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available