Recent developments on surface acoustic wave (SAW) sensors for harsh conditions

Paul Schiopu; Irinela Chilibon; Neculai Grosu; Alexandru Craciun

doi:10.1117/12.2071780

20 February 2015 Recent developments on surface acoustic wave (SAW) sensors for harsh conditions

Paul Schiopu, Irinela Chilibon, Neculai Grosu, Alexandru Craciun

Proceedings Volume 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII; 92581I (2015) https://doi.org/10.1117/12.2071780
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies 2014, 2014, Constanta, Romania

Abstract

The results of research into Surface Acoustic Waves (SAW) devices have been recognized for their efficiency and versatility in the electrical signals processing. Actual progress in the industrial application of piezoelectric materials such as Lithium Niobate (LiNbO₃), Langasite (LGS), Lanthanum-Gallium Silicate La₃Ga₅SiO₁₄ and Gallium Orthophosphate (GaPO₄), allows the manufacturing of devices with piezoelectric performances, which overcome the limits obtained with quartz crystals. The single crystal materials have a long term high stability - near to infinite – and moreover, some of these have an excellent behavior with temperature variation. Today, GaPO₄ with its properties is by far the best suited piezoelectric material to be used in sensor applications for machine monitoring and pressure measurements, at high temperatures. SAW micro devices based on GaPO₄ operate at temperatures of up to 800⁰C. For a particular case, of harsh-environment applications, additional challenges need to be overcome, relating to substrate integrity and operation, thin film electrode fabrication, device packaging, and sensor interrogation. This paper reviews the novel progres in the area of (SAW) sensors for harsh conditions.

Citation Download Citation

Paul Schiopu, Irinela Chilibon, Neculai Grosu, and Alexandru Craciun "Recent developments on surface acoustic wave (SAW) sensors for harsh conditions", Proc. SPIE 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII, 92581I (20 February 2015); https://doi.org/10.1117/12.2071780

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