Fabrication of a gas sensor array with micro-wells for VOCs gas sensing based on polymer/carbon nanotube thin films

Guangzhong Xie; Tao Xie; Tao Zhu; Yadong Jiang; Huiling Tai

doi:10.1117/12.2069587

21 August 2014 Fabrication of a gas sensor array with micro-wells for VOCs gas sensing based on polymer/carbon nanotube thin films

Guangzhong Xie, Tao Xie, Tao Zhu, Yadong Jiang, Huiling Tai

Author Affiliations +

Proceedings Volume 9285, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Smart Structures and Materials for Manufacturing and Testing; 928503 (2014) https://doi.org/10.1117/12.2069587
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

In this paper, gas sensor array with micro-well was designed and prepared by Micro Electro-Mechanical Systems (MEMS) technology. The micro-well and interdigital electrodes of sensor array were prepared using photolithography process, reactive ion etching (RIE) process, wet etching and conventional vacuum evaporation. In the manufacture process of the gas sensor array, KOH wet etching process was mainly discussed. The optimum etching processing parameters were as follows: 30 wt% KOH solution at 80 °C, a cooling back-flow device and a magnetic stirrer. The multi-walled carbon nanotubes (MWCNTs)-polyethyleneoxide (PEO) and MWNTs-Polyvinylpyrrolidone (PVP) composite films were utilized as sensitive layers to test gas-sensing properties. Response performances of MWCNTs- PEO and MWNTs-PVP composite films to toluene vapor and methanol vapor at room temperature were investigated. The results revealed that the sensor array showed a larger sensitivity to toluene vapor than to methanol vapor. In addition, the sensing mechanisms were studied as well.

Citation Download Citation

Guangzhong Xie, Tao Xie, Tao Zhu, Yadong Jiang, and Huiling Tai "Fabrication of a gas sensor array with micro-wells for VOCs gas sensing based on polymer/carbon nanotube thin films", Proc. SPIE 9285, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Smart Structures and Materials for Manufacturing and Testing, 928503 (21 August 2014); https://doi.org/10.1117/12.2069587

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