Fabrication of Fresnel microlens with excimer laser contour ablation

Michał R. Wójcik; Arkadiusz J. Antończak; Paweł E. Kozioł; Łukasz K. Łazarek; Bogusz D. Stępak; Krzysztof M. Abramski

doi:10.1117/12.2063633

22 August 2014 Fabrication of Fresnel microlens with excimer laser contour ablation

Michał R. Wójcik, Arkadiusz J. Antończak, Paweł E. Kozioł, Łukasz K. Łazarek, Bogusz D. Stępak, Krzysztof M. Abramski

Proceedings Volume 9286, Second International Conference on Applications of Optics and Photonics; 928612 (2014) https://doi.org/10.1117/12.2063633
Event: Second International Conference on Applications of Optics and Photonics, 2014, Aveiro, Portugal

Abstract

Laser micromachining systems based on excimer lasers are usually oriented to work with mask projection regime because of the low pulse repetition rate as well as large beam aperture of the laser source. In case of fabricating of the complex 3D structures, this approach introduces a number of limitations. Alternative solution might be usage of direct writing laser mode. Some examples of the so called contour ablation approach for fabricating microlenses with an absolutely monotonically changing cross-sectional profile are presented in the literature. Based on this idea and introducing new variables like automatic mask selection as well as optimizing process algorithms led us to obtain more versatile method for shape approximation. Hence, there were fabricated structures with cross-sectional profiles described as functions that are monotonic on specified intervals such as Fresnel microlenses. In this paper we describe approximation of process parameters for obtaining desired cross-sectional profiles and finally fabrication of few exemplary microlenses. All structures were characterized by a digital optical microscopy and compared to the given profiles. The accuracy of reproduction of the desired structures at the level of single microns was achieved.

Citation Download Citation

Michał R. Wójcik, Arkadiusz J. Antończak, Paweł E. Kozioł, Łukasz K. Łazarek, Bogusz D. Stępak, and Krzysztof M. Abramski "Fabrication of Fresnel microlens with excimer laser contour ablation", Proc. SPIE 9286, Second International Conference on Applications of Optics and Photonics, 928612 (22 August 2014); https://doi.org/10.1117/12.2063633

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