Optically transparent fluoro-containing polyimide films with low dielectric permeability

V. Kravtsova; M. Umersakova; R. Iskakov; O. Prikhodko; N. Korobova

doi:10.1117/12.2180429

18 December 2014 Optically transparent fluoro-containing polyimide films with low dielectric permeability

V. Kravtsova, M. Umersakova, R. Iskakov, O. Prikhodko, N. Korobova

Proceedings Volume 9440, International Conference on Micro- and Nano-Electronics 2014; 944003 (2014) https://doi.org/10.1117/12.2180429
Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation

Abstract

Optical, dielectric, thermal, physico-mechanical properties of new fluoro-containing alicyclic polyimides were investigated. High optical transparency in visible and UV ranges of the films with thickness 10-25 μm, which lower boundary was registered at 125-260 nm; as well as reflectivity index being 1.492-1.515 were recorded. Dielectric permeability was characterized with low rates and stability up to 300 °С depending on chemical structure. Polyimides were stable with heating in air up to 320-380 °С. Prepared films show break tensile at 145 MPa with elongation up to 50% due to the excellent film-forming properties. Films based on polyimides with polyaniline composition demonstrates reflectivity index 1.60.

Citation Download Citation

V. Kravtsova, M. Umersakova, R. Iskakov, O. Prikhodko, and N. Korobova "Optically transparent fluoro-containing polyimide films with low dielectric permeability", Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 944003 (18 December 2014); https://doi.org/10.1117/12.2180429

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