Laser Alignment Techniques For Simultaneous Machine Tool Geometric Error Detection

J. Ni; S. M. Wu

doi:10.1117/12.947653

16 January 1989 Laser Alignment Techniques For Simultaneous Machine Tool Geometric Error Detection

J. Ni, S. M. Wu

Author Affiliations +

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947653
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

An optical measurement system has been developed for the simultaneous detection of multiple geometric error components of machine tools. The system is designed based upon laser alignment techniques where laser beams are used as measurement reference datum. The system can measure simultaneously 5 error components for each moving axis of a machine tool or coordinate measuring machine. They are: two straightness error components, pitch, yaw, and roll errors. Through actual calibration and measurement, the accuracy of the current system is estimated to be 2 µm for straightness measurements and better than 0.05 arcsec for angular error measurements with a 0.5 m offset between a reflecting mirror and a receiving photo sensor.

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J. Ni and S. M. Wu "Laser Alignment Techniques For Simultaneous Machine Tool Geometric Error Detection", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947653

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