Reverse optimization reconstruction method in non-null aspheric interferometry

Lei Zhang; Dong Liu; Tu Shi; Yongying Yang; Shiyao Chong; Yibing Shen; Jian Bai

doi:10.1117/12.2195844

12 October 2015 Reverse optimization reconstruction method in non-null aspheric interferometry

Lei Zhang, Dong Liu, Tu Shi, Yongying Yang, Shiyao Chong, Yibing Shen, Jian Bai

Proceedings Volume 9633, Optifab 2015; 96332D (2015) https://doi.org/10.1117/12.2195844
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

Aspheric non-null test achieves more flexible measurements than the null test. However, the precision calibration for retrace error has always been difficult. A reverse optimization reconstruction (ROR) method is proposed for the retrace error calibration as well as the aspheric figure error extraction based on system modeling. An optimization function is set up with system model, in which the wavefront data from experiment is inserted as the optimization objective while the figure error under test in the model as the optimization variable. The optimization is executed by the reverse ray tracing in the system model until the test wavefront in the model is consistent with the one in experiment. At this point, the surface figure error in the model is considered to be consistent with the one in experiment. With the Zernike fitting, the aspheric surface figure error is then reconstructed in the form of Zernike polynomials. Numerical simulations verifying the high accuracy of the ROR method are presented with error considerations. A set of experiments are carried out to demonstrate the validity and repeatability of ROR method. Compared with the results of Zygo interferometer (null test), the measurement error by the ROR method achieves better than 1/10λ.

Citation Download Citation

Lei Zhang, Dong Liu, Tu Shi, Yongying Yang, Shiyao Chong, Yibing Shen, and Jian Bai "Reverse optimization reconstruction method in non-null aspheric interferometry", Proc. SPIE 9633, Optifab 2015, 96332D (12 October 2015); https://doi.org/10.1117/12.2195844

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Aspheric lenses

Wavefronts

Data modeling

Optimization (mathematics)

Systems modeling

Ray tracing

Interferometry

Show All Keywords

Keywords/Phrases

Search In:

Publication Years