Low Stress, Vacuum - Chuck Mounting Techniques For The Diamond Machining Of Thin Substrates

A. R Hedges; R A Parker

doi:10.1117/12.948045

29 January 1989 Low Stress, Vacuum - Chuck Mounting Techniques For The Diamond Machining Of Thin Substrates

A. R Hedges, R A Parker

Proceedings Volume 0966, Advances in Fabrication and Metrology for Optics and Large Optics; (1989) https://doi.org/10.1117/12.948045
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Commercially available diamond turning machines offer high levels of accuracy where the full potential of the machine is realised. Unfortunately, surface form accuracy and roughness are dependent on the limiting stiffness of the machine/workpiece environment. Vacuum chuck methods offer a high degree of stiffness combined with the opportunity of mounting substrates in a stress free manner. Thin substrates (4-12 mm) are relatively easily stressed and the application of vacuum chuck mounting for such components, present many problems. These include deformations due to internal material stress, vibration, and the print-through effect. We have measured the reproducability of deformations caused by the print-through effect and have developed techniques for its elimination. The feasibility of using this print-through mechanism for machining non-rotationally symmetric forms is also discussed.

Citation Download Citation

A. R Hedges and R A Parker "Low Stress, Vacuum - Chuck Mounting Techniques For The Diamond Machining Of Thin Substrates", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948045

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available