The effect of structural coefficient on stiffness and deformation of hydrostatic guideway

Zhifeng Lai; Zheng Qiao; Peng Zhang; Bo Wang; Yangong Wu

doi:10.1117/12.2242284

25 October 2016 The effect of structural coefficient on stiffness and deformation of hydrostatic guideway

Zhifeng Lai, Zheng Qiao, Peng Zhang, Bo Wang, Yangong Wu

Proceedings Volume 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials; 968509 (2016) https://doi.org/10.1117/12.2242284
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Hydrostatic guideway has been widely used for ultra-precision machine tools due to its high stiffness and motion accuracy. In order to optimize the stiffness and motion accuracy of hydrostatic guideway, the effect of different diameters orifice restrictors on the stiffness and deformation of hydrostatic guideway is investigated in detail in this paper. The theoretically optimal structural coefficient is verified through the experiments. Hydrostatic guideway can obtain the maximum stiffness when the value of optimal structural coefficient is 0.707. And changing the diameter of orifice restrictors is an effective method to adjusting the structural coefficient. Due to the error caused by manufacture and assembly of hydrostatic guideway, the optimal structural coefficient is hard to be obtained accurately. Based on this condition, a larger structural coefficient is adopted to reduce the oil pressure in the pocket of hydrostatic guideway effectively, so that the deformation of guideway can be reduced. And finally, the stiffness loss caused by the deformation decreased. In addition, the experimental results show that the maximum deformation of hydrostatic guideway can be reduced from 2.06μm to 1.82μm and the stiffness arise from 1453N/μm to 1855N/μm when orifice restrictors with 0.15mm diameter are used rather than 0.2mm diameter.

Citation Download Citation

Zhifeng Lai, Zheng Qiao, Peng Zhang, Bo Wang, and Yangong Wu "The effect of structural coefficient on stiffness and deformation of hydrostatic guideway", Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 968509 (25 October 2016); https://doi.org/10.1117/12.2242284

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