THz transmittance and electrical properties of silicon doped vanadium dioxide films tuning by annealing temperature

Xuefei Wu; Zhiming Wu; Chunhui Ji; Zehua Huang; Jun Gou; Jun Wang; Yadong Jiang

doi:10.1117/12.2242776

25 October 2016 THz transmittance and electrical properties of silicon doped vanadium dioxide films tuning by annealing temperature

Xuefei Wu, Zhiming Wu, Chunhui Ji, Zehua Huang, Jun Gou, Jun Wang, Yadong Jiang

Author Affiliations +

Proceedings Volume 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices; 968603 (2016) https://doi.org/10.1117/12.2242776
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Silicon doped vanadium dioxide (VO₂) films were successfully prepared on high purity Si(111) substrate. Confirmed by X-ray diffraction, all samples showed a preference orientation of (011) direction. Introducing silicon led grain sizes decreasing comparing to undoped VO₂ film, and this result induced a narrow hysteresis width in MIT performance. Furthermore, silicon doped VO₂ films annealing in different temperature presented different phase transition properties. In the electrical, a higher annealing temperature resulted in a decrease of sheet resistance and lowering the transition temperature. In terahertz optical transmittance, silicon doped VO₂ films keep an excellent modulation ratio, indicating a great potential in the application of terahertz modulator devices.

Citation Download Citation

Xuefei Wu, Zhiming Wu, Chunhui Ji, Zehua Huang, Jun Gou, Jun Wang, and Yadong Jiang "THz transmittance and electrical properties of silicon doped vanadium dioxide films tuning by annealing temperature", Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 968603 (25 October 2016); https://doi.org/10.1117/12.2242776

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KEYWORDS

Silicon

Silicon films

Annealing

Terahertz radiation

Transmittance

Crystals

Vanadium

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