Diamond-Like Carbon Films By RF Plasma - Enhanced Chemical Vapour Deposition

R. S. Yalamanchi; G. K. M. Thutupalli

doi:10.1117/12.948138

17 January 1989 Diamond-Like Carbon Films By RF Plasma - Enhanced Chemical Vapour Deposition

R. S. Yalamanchi, G. K. M. Thutupalli

Proceedings Volume 0969, Diamond Optics; (1989) https://doi.org/10.1117/12.948138
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Diamond-like Carbon films synthesized by RF plasma-enhanced chemical vapour deposition were systematically characterized for their structural, optical and mechanical properties. The process parameters were optimized by the use of orthogonal tables to get the 'diamond-like' properties. DLC films were demonstrated to be efficient and durable antireflection coatings for IR devices. Plasma diagnostics were carried out by Langmuir probe method and Optical Emission Actionometry for Oxygen, Air and Water plasmas to give an understanding of the DLC etch mechanism.

Citation Download Citation

R. S. Yalamanchi and G. K. M. Thutupalli "Diamond-Like Carbon Films By RF Plasma - Enhanced Chemical Vapour Deposition", Proc. SPIE 0969, Diamond Optics, (17 January 1989); https://doi.org/10.1117/12.948138

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