Super-resolved infrared complex reflectance micro-spectroscopy

Tyler J. Huffman; Robert Furstenberg; Christopher A. Kendziora; R. A. McGill

doi:10.1117/12.2619063

30 May 2022 Super-resolved infrared complex reflectance micro-spectroscopy

Tyler J. Huffman, Robert Furstenberg, Christopher A. Kendziora, R. A. McGill

Proceedings Volume PC12098, Dimensional Optical Metrology and Inspection for Practical Applications XI; PC1209808 (2022) https://doi.org/10.1117/12.2619063
Event: SPIE Defense + Commercial Sensing, 2022, Orlando, Florida, United States

Abstract

Accurate measurement of the optical constants (n,k) requires an absorptive (i.e. transmission) and dispersive (i.e. reflectance) measurement. Ellipsometry is the gold standard for such measurements, particularly on opaque samples where typical techniques fail to provide an absorptive spectrum. However, an alternative to ellipsometry is needed for microscopy because of the inherent range of angles and planes of incidence when focusing to a small spot. Here we present early images from our complex far-field spectroscopic infrared microscope. An asymmetric interferometer is used to directly measure the infrared reflectance amplitude and absolute phase shift. The complex optical constants can then be extracted without the large uncertainty that arises with a reflectance amplitude measurement alone. Modern QCL sources provide sufficient infrared intensity to realize a type-2 scanning microscope, to achieve a resolution of λ/4 N.A., twice the traditional Abbe limit.

Conference Presentation

Citation Download Citation

Tyler J. Huffman, Robert Furstenberg, Christopher A. Kendziora, and R. A. McGill "Super-resolved infrared complex reflectance micro-spectroscopy", Proc. SPIE PC12098, Dimensional Optical Metrology and Inspection for Practical Applications XI, PC1209808 (30 May 2022); https://doi.org/10.1117/12.2619063

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