The conformal-evaporated-film-by-rotation technique applied to the replication of surface structures (Conference Presentation)

Raúl J. Martín-Palma

doi:10.1117/12.2657428

25 April 2023 The conformal-evaporated-film-by-rotation technique applied to the replication of surface structures (Conference Presentation)

Raúl J. Martín-Palma

Author Affiliations +

Proceedings Volume PC12490, Surface Engineering and Forensics; PC1249003 (2023) https://doi.org/10.1117/12.2657428
Event: SPIE Smart Structures + Nondestructive Evaluation, 2023, Long Beach, California, United States

Abstract

The oblique angle deposition technique, based on directing a vapor flux towards a substrate with the trajectory of adatoms not parallel to the substrate normal, has been demonstrated as a method capable of generating nanostructured thin films. Sequential substrate movements can be used to shape the morphology of the thin films. The conformal-evaporated-film-by-rotation technique, which has evolved from the oblique angle deposition technique, was initially developed to fabricate high-fidelity replicas of biotemplates with features on the micron- and nanoscales distributed over a curved surface. This technique has been demonstrated to be effective in several fields ranging from photonics to forensics.

Conference Presentation

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Raúl J. Martín-Palma "The conformal-evaporated-film-by-rotation technique applied to the replication of surface structures (Conference Presentation)", Proc. SPIE PC12490, Surface Engineering and Forensics, PC1249003 (25 April 2023); https://doi.org/10.1117/12.2657428

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KEYWORDS

Fabrication

Forensic science

Nanolithography

Nanostructured thin films

Photonics

Thin films

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