The SLX journey: designing a cost-efficient laser mask writer for today’s and tomorrow’s maskshop requirements

Robert Eklund; Mikael L. Wahlsten; Mats O. Rosling; Martin Glimtoft; Peter Henriksson; Anders Svensson; Fredric Ihren; Youngjin Park

doi:10.1117/12.2687582

22 November 2023 The SLX journey: designing a cost-efficient laser mask writer for today’s and tomorrow’s maskshop requirements

Robert Eklund, Mikael L. Wahlsten, Mats O. Rosling, Martin Glimtoft, Peter Henriksson, Anders Svensson, Fredric Ihren, Youngjin Park

Author Affiliations +

Proceedings Volume PC12751, Photomask Technology 2023; PC127510H (2023) https://doi.org/10.1117/12.2687582
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Abstract

Mycronic assessed the market for Laser Mask Writers and concluded that there was an opportunity if the product was reliable, had high uptime, was cost-efficient to compete with fully depreciated writers and was sustainable including having a small carbon footprint. To achieve this, the platform needed to be modern allowing to support flexibility in a rapidly changing environment and enable the possibility to develop new functionalities to meet future customer demands to last long, while keeping the development cost down. This paper describes the process and the decisions behind the SLX writer and how it has been received by the market. The future of the SLX will also be discussed and how key parameters like resolution and registration will be improved for future products.

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Robert Eklund, Mikael L. Wahlsten, Mats O. Rosling, Martin Glimtoft, Peter Henriksson, Anders Svensson, Fredric Ihren, and Youngjin Park "The SLX journey: designing a cost-efficient laser mask writer for today’s and tomorrow’s maskshop requirements", Proc. SPIE PC12751, Photomask Technology 2023, PC127510H (22 November 2023); https://doi.org/10.1117/12.2687582

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