Nanofabrication of polymer micro-ring resonator arrays-based ultrasonic detector arrays for photoacoustic imaging

Youngseop Lee; Hao F. Zhang; Cheng Sun

doi:10.1117/12.3001093

13 March 2024 Nanofabrication of polymer micro-ring resonator arrays-based ultrasonic detector arrays for photoacoustic imaging

Youngseop Lee, Hao F. Zhang, Cheng Sun

Author Affiliations +

Proceedings Volume PC12842, Photons Plus Ultrasound: Imaging and Sensing 2024; PC1284208 (2024) https://doi.org/10.1117/12.3001093
Event: SPIE BiOS, 2024, San Francisco, California, United States

Abstract

Polymer micro-ring resonators (MRRs) have been proven to be one of the most versatile choices for ultrasonic detections, largely due to their high detection sensitivity over a wide frequency range, optical transparency, and at a significantly reduced form-factor. However, precisely controlling the resonance mode of individual MRRs became increasingly difficult due to the stringent requirements in their dimensional tolerance. Here we report a nanofabrication strategy to substantially improve the dimensional accuracy of the MRR to precisely control its resonance modes. We experimentally demonstrate polymer MRR in an array format, in enabling rapid and parallel ultrasound detection.

Conference Presentation

Citation Download Citation

Youngseop Lee, Hao F. Zhang, and Cheng Sun "Nanofabrication of polymer micro-ring resonator arrays-based ultrasonic detector arrays for photoacoustic imaging", Proc. SPIE PC12842, Photons Plus Ultrasound: Imaging and Sensing 2024, PC1284208 (13 March 2024); https://doi.org/10.1117/12.3001093

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