Electrically driven photonic crystal surface-emitting laser fabricated by deep-hole dry etching

Myeongeun Kim; Myungjae Lee; Heonsu Jeon

doi:10.1117/12.3000460

13 March 2024 Electrically driven photonic crystal surface-emitting laser fabricated by deep-hole dry etching

Myeongeun Kim, Myungjae Lee, Heonsu Jeon

Proceedings Volume PC12896, Photonic and Phononic Properties of Engineered Nanostructures XIV; PC128961D (2024) https://doi.org/10.1117/12.3000460
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

We have demonstrated an electrically driven photonic crystal (PhC) surface-emitting laser using deep-hole dry etching. The laser is based on the gamma-point PhC band-edge mode, which has a single-mode nature and a surface-emitting characteristic. The square lattice PhC pattern was provided using e-beam lithography and inductively-coupled-plasma reactive-ion etching, wherein the deeply etched holes induce sufficient lateral optical feedback. Under pulsed injection mode, we observed lasing action at a single wavelength of 1532 nm, and the threshold current density was measured to be ~1.05 kA/cm2.

Citation Download Citation

Myeongeun Kim, Myungjae Lee, and Heonsu Jeon "Electrically driven photonic crystal surface-emitting laser fabricated by deep-hole dry etching", Proc. SPIE PC12896, Photonic and Phononic Properties of Engineered Nanostructures XIV, PC128961D (13 March 2024); https://doi.org/10.1117/12.3000460

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