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Physical vapor deposition equipment based on evaporation, sputtering or ion beam sputtering will be compared based on results achieved for selected challenging Interference filter. Examples are oxides coatings in the DUV spectral region or step edge filters for the VIS and NIR.
Harro Hagedorn
"The choice of Deposition Equipment for challenging Interference Filter", Proc. SPIE PC13020, Advances in Optical Thin Films VIII, PC1302004 (18 June 2024); https://doi.org/10.1117/12.3023781
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Harro Hagedorn, "The choice of Deposition Equipment for challenging Interference Filter," Proc. SPIE PC13020, Advances in Optical Thin Films VIII, PC1302004 (18 June 2024); https://doi.org/10.1117/12.3023781