Properties of La1-xAlxF3 Nanocomposite Coatings Prepared by Co-evaporation Technique for 193 nm Mirrors.

Xinshang Niu; Hongfei Jiao; Yingfu Li; Xiaochuan Ji; Jingjing Xia; Jinlong Zhang; Xinbin Cheng; Zhanshan Wang

doi:10.1117/12.3022824

18 June 2024 Properties of La1-xAlxF3 Nanocomposite Coatings Prepared by Co-evaporation Technique for 193 nm Mirrors.

Xinshang Niu, Hongfei Jiao, Yingfu Li, Xiaochuan Ji, Jingjing Xia, Jinlong Zhang, Xinbin Cheng, Zhanshan Wang

Proceedings Volume PC13020, Advances in Optical Thin Films VIII; PC130200F (2024) https://doi.org/10.1117/12.3022824
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

La1-xAlxF3 nanocomposites with different AlF3 doping ratios were synthesized using a dual-source electron beam co-evaporation technique to achieve amorphous La1-xAlxF3 coatings with low loss and tensile stress. We analyzed the evolution laws of optical constants, microstructures, film stress, and film loss of La1-xAlxF3 nanocomposites with the change of element content. When x ≥ 0.30, high-refractive-index nanocomposites La1-xAlxF3 demonstrated reduced absorption, integrated amorphous structure, and lower tensile stress. The nanocomposite exhibited superior performance with an excellent overall structure, as well as reduced tensile stress. Additionally, this material was employed to create a high-performance reflective film with a high reflectivity.

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Xinshang Niu, Hongfei Jiao, Yingfu Li, Xiaochuan Ji, Jingjing Xia, Jinlong Zhang, Xinbin Cheng, and Zhanshan Wang "Properties of La1-xAlxF3 Nanocomposite Coatings Prepared by Co-evaporation Technique for 193 nm Mirrors.", Proc. SPIE PC13020, Advances in Optical Thin Films VIII, PC130200F (18 June 2024); https://doi.org/10.1117/12.3022824

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