Presentation
3 October 2024 Toward large-scale nonvolatile electrically programmable photonics with deterministic multilevel operation
Author Affiliations +
Abstract
We introduce a scalable platform designed for very-large-scale programmable photonics, achieved through the integration of 300-mm-wafer-scale fabrication processes and in-house phase-change material fabrication. This approach enables reversible electrical tuning capabilities up to 50, 000 switching events. Moreover, we demonstrate a deterministic multilevel scheme capable of achieving 2^N optical levels, offering enhanced control and versatility in programmable photonics applications.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rui Chen, Virat Tara, Minho Choi, Jayita Dutta, Justin Sim, Julian Ye, Jiajiu Zheng, Zhuoran Fang, and Arka Majumdar "Toward large-scale nonvolatile electrically programmable photonics with deterministic multilevel operation", Proc. SPIE PC13110, Active Photonic Platforms (APP) 2024, PC131101H (3 October 2024); https://doi.org/10.1117/12.3028727
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KEYWORDS
Photonic integrated circuits

Fabrication

Silicon photonics

Process control

Prototyping

Rapid manufacturing

Refractive index

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