Harnessing deep UV and VUV microplasma photonics for emerging applications in atomic clocks, microfabrication processes, and air disinfection

Sung-Jin Park

doi:10.1117/12.3028359

4 October 2024 Harnessing deep UV and VUV microplasma photonics for emerging applications in atomic clocks, microfabrication processes, and air disinfection

Sung-Jin Park

Author Affiliations +

Proceedings Volume PC13115, UV and Higher Energy Photonics: From Materials to Applications 2024; PC131150D (2024) https://doi.org/10.1117/12.3028359
Event: Nanoscience + Engineering, 2024, San Diego, California, United States

Abstract

Low-temperature microplasmas, efficient sources of ions, electrons, and photons, particularly from microcavity plasma arrays, offer unprecedented performance in photonics. This paper reports recent advancements across three key areas: precise timekeeping, achieved through integrating microplasma mercury ion lamps into miniature clock systems with exceptional stability; uniform and high-fluence photon generation for VUV photolithography and nanopatterning, enabling selective surface modification and low temperature dielectric depositions at nano/micro scales; and deep UV (Far UV-C) excimer emission from microplasma lamps, utilized in preventing airborne as well as foodborne pathogen transmission. Far UV-C's safety for human exposure presents potential for indoor disinfection, including wearable devices, shaping biothreat prevention strategies.

Conference Presentation

Citation Download Citation

Sung-Jin Park "Harnessing deep UV and VUV microplasma photonics for emerging applications in atomic clocks, microfabrication processes, and air disinfection", Proc. SPIE PC13115, UV and Higher Energy Photonics: From Materials to Applications 2024, PC131150D (4 October 2024); https://doi.org/10.1117/12.3028359

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available