SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications

Angelo Gaitas; Robert W. Hower

doi:10.1117/1.JMM.13.3.030501

15 September 2014 SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications

Angelo Gaitas, Robert W. Hower

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 3, 030501 (September 2014). https://doi.org/10.1117/1.JMM.13.3.030501

Abstract

We describe a method for fabricating an aperture on a fluidic cantilever device using SU-8 as a structural material. The device can ultimately be used for patch clamping, microinjections, fluidic delivery, fluidic deposition, and micromaterial removal. In the first generation of this device, the initial aperture diameter is 10 μm and is fabricated on a silicon-on-insulator (SOI) wafer that is structurally used to define the aperture. The aperture can be reduced in size through mask design. This self-aligned process allows for patterning on the sharp tip projecting out of the fluidic plane on the cantilever and is batch fabricated, reducing the cost and time for manufacture. The initial mask, SOI device layer thickness, and the width of the base of the tip define the size of the aperture. The SU-8 micromachined cantilever includes an electrode and a force sensing mechanism. The cantilever can be easily integrated with an atomic force microscope or an optical microscope.

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Angelo Gaitas and Robert W. Hower "SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(3), 030501 (15 September 2014). https://doi.org/10.1117/1.JMM.13.3.030501

Published: 15 September 2014

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Cited by 10 scholarly publications and 3 patents.

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KEYWORDS

Microfluidics

Electrodes

Silicon

Semiconducting wafers

Etching

Oxides

Resistance

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CHORUS Article. This article was made freely available starting 15 September 2015

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