Replication of deep x-ray lithography fabricated microstructures through casting of soft material

Frederic Perennes; B. Marmirolli; Massimo Tormen; Maurizio Matteucci; Enzo M. Di Fabrizio

doi:10.1117/1.2176730

1 January 2006 Replication of deep x-ray lithography fabricated microstructures through casting of soft material

Frederic Perennes, B. Marmirolli, Massimo Tormen, Maurizio Matteucci, Enzo M. Di Fabrizio

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 1, 011007 (January 2006). https://doi.org/10.1117/1.2176730

Abstract

We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35:1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20:1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Frederic Perennes, B. Marmirolli, Massimo Tormen, Maurizio Matteucci, and Enzo M. Di Fabrizio "Replication of deep x-ray lithography fabricated microstructures through casting of soft material," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 011007 (1 January 2006). https://doi.org/10.1117/1.2176730

Published: 1 January 2006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available