MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

Anna Rissanen; Altti Akujärvi; Jarkko E. Antila; Martti Blomberg; Heikki K. Saari

doi:10.1117/1.JMM.11.2.023003

25 May 2012 MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers

Anna Rissanen, Altti Akujärvi, Jarkko E. Antila, Martti Blomberg, Heikki K. Saari

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 2, 023003 (May 2012). https://doi.org/10.1117/1.JMM.11.2.023003

Abstract

New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420 nm and λ = 670 nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.

Citation Download Citation

Anna Rissanen, Altti Akujärvi, Jarkko E. Antila, Martti Blomberg, and Heikki K. Saari "MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 023003 (25 May 2012). https://doi.org/10.1117/1.JMM.11.2.023003

Published: 25 May 2012

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available