Lithography Should Not Be a Glass Bead Game

Harry J. Levinson

doi:10.1117/1.JMM.22.3.030101

13 September 2023 Lithography Should Not Be a Glass Bead Game

Harry J. Levinson

Journal of Micro/Nanopatterning, Materials, and Metrology, Vol. 22, Issue 3, 030101 (September 2023). https://doi.org/10.1117/1.JMM.22.3.030101

Abstract

Editor-in-Chief Harry Levinson writes about the importance of connections between academia and industry.

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Harry J. Levinson "Lithography Should Not Be a Glass Bead Game," Journal of Micro/Nanopatterning, Materials, and Metrology 22(3), 030101 (13 September 2023). https://doi.org/10.1117/1.JMM.22.3.030101

Published: 13 September 2023

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KEYWORDS

Glasses

Industry

Lithography

Beryllium

Electrons

Optical lithography

Semiconductors

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