Characterizations of composite TiO2-MgF2 films prepared by reactive ion-assisted coevaporation

Rung-Ywan Tsai; Mu-Yi Hua; Chaur-Tsang Wei; Fang Chung Ho

doi:10.1117/12.179392

1 October 1994 Characterizations of composite TiO₂-MgF₂ films prepared by reactive ion-assisted coevaporation

Rung-Ywan Tsai, Mu-Yi Hua, Chaur-Tsang Wei, Fang Chung Ho

Author Affiliations +

Optical Engineering, Vol. 33, Issue 10, (October 1994). https://doi.org/10.1117/12.179392

Abstract

Composite TiO₂-MgF₂ films are fabricated by reactive ion-assisted coevaporation. The optical, structural, mechanical, and chemical properties of these films are systematically studied. From the analysis of x-ray diffraction and spectrophotometer data the crystallographic phase compositions and the optical properties of the composite films are found to be controlled by the relative deposition rate of two evaporation sources. The refractive index and the microhardness of the composite films behave nonlinearly with respect to the composition of the films. When the molar fraction of TiO₂ is higher than 40%, the hardness of the composite films exceeds that of pure TiO₂ and glass substrate. The surface morphologies of all composite films are featureless and very smooth. It has been shown that composite TiO₂-MgF₂ films prepared by reactive ion-assisted coevaporation are very suitable for the design and fabrication of single-layer and multilayer antireflection coatings.

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Rung-Ywan Tsai, Mu-Yi Hua, Chaur-Tsang Wei, and Fang Chung Ho "Characterizations of composite TiO₂-MgF₂ films prepared by reactive ion-assisted coevaporation," Optical Engineering 33(10), (1 October 1994). https://doi.org/10.1117/12.179392

Published: 1 October 1994

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