Non-oxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm

Juan I. Larruquert; Jose Antonio Mendez; Jose Antonio Aznarez

doi:10.1117/1.1477438

1 June 2002 Non-oxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm

Juan I. Larruquert, Jose Antonio Mendez, Jose Antonio Aznarez

Optical Engineering, Vol. 41, Issue 6, (June 2002). https://doi.org/10.1117/1.1477438

Bilayers of a thin, nonoxidized Al film over an Ir film are prepared. The bilayers are intended to enhance the reflectance of Al below the Al plasma wavelength (?p~83 nm). Above ?p the bilayers have a high reflectance comparable to that of single Al films. Ir films were deposited by electron gun evaporation on a heated substrate. Al films of various thicknesses are deposited by evaporation from a thermal source on the Ir film once it is cooled to room temperature. The bilayers are prepared under ultra-high-vacuum (UHV) conditions and their reflectance is measured in situ. Accelerated aging processes, which are performed by annealing the bilayers in UHV, show that the bilayers are stable after 1 h annealing at temperatures up to 540±625 K. The bilayers show no observable deterioration after long-term storage under normal atmosphere. The optical constants of Ir films are also obtained. In-orbit coating of optical surfaces with Ir/Al bilayers is proposed for extreme UV astronomy.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Juan I. Larruquert, Jose Antonio Mendez, and Jose Antonio Aznarez "Non-oxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm," Optical Engineering 41(6), (1 June 2002). https://doi.org/10.1117/1.1477438

Published: 1 June 2002

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