Fabrication of a soft x-ray microscope mirror using an epoxy replication method

Kwon Su Chon; Yoshiharu Namba; Kyong-Woo Kim; Sunghoon Kang; Kwon-Ha Yoon

doi:10.1117/1.2829608

1 January 2008 Fabrication of a soft x-ray microscope mirror using an epoxy replication method

Kwon Su Chon, Yoshiharu Namba, Kyong-Woo Kim, Sunghoon Kang, Kwon-Ha Yoon

Author Affiliations +

Optical Engineering, Vol. 47, Issue 1, 013401 (January 2008). https://doi.org/10.1117/1.2829608

Abstract

An x-ray microscope is a useful tool in medicine and biology. The performance of an x-ray microscope critically depends on its x-ray optics. In this paper, a Wolter type-I x-ray mirror is considered for biological applications. It was fabricated using an epoxy replication method. Fabrication tolerances (figure error and surface roughness) of the soft x-ray mirror were examined. A master mandrel was prepared using single-point diamond turning and polishing, and a mirror with axial symmetry was successfully manufactured by coating of a parting agent, epoxy molding, and separation steps. The replicated mirror showed 1.4-nm rms surface roughness and 160-nm peak-to-valley (and 34.3-nm rms) figure error. Several mirrors were manufactured from only one master mandrel.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Kwon Su Chon, Yoshiharu Namba, Kyong-Woo Kim, Sunghoon Kang, and Kwon-Ha Yoon "Fabrication of a soft x-ray microscope mirror using an epoxy replication method," Optical Engineering 47(1), 013401 (1 January 2008). https://doi.org/10.1117/1.2829608

Published: 1 January 2008

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