24 October 2024 Ultra-compact and low-loss silicon nitride optical mode-size converter
Zanyun Zhang, Cuiran Meng, Hao Jiang, Meixin Li, Xiaoqing Lv, Kaixin Zhang, Tianjun Liu, Qixin Wang, Beiju Huang
Author Affiliations +
Abstract

We designed and implemented a compact silicon nitride mode-spot converter that is non-linear and stepwise segmented. The mode-spot converter with a length of 20 μm and a simulated transmission efficiency of 95.7% was obtained using the three-dimensional finite-difference time-domain method and particle swarm optimization algorithm. This device can connect a 10-μm wide waveguide with a 1-μm wide single-mode waveguide for O-band operation. Compared with a linear taper with equivalent transmission efficiency, this device reduces the footprint by 80%. The mode-spot converter was fabricated on a silicon nitride platform using electron-beam lithography and inductively coupled plasma etching processes. The fabricated device exhibits a measured average insertion loss of 0.30 dB in the O-band and 1 dB bandwidth of more than 100 nm.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Zanyun Zhang, Cuiran Meng, Hao Jiang, Meixin Li, Xiaoqing Lv, Kaixin Zhang, Tianjun Liu, Qixin Wang, and Beiju Huang "Ultra-compact and low-loss silicon nitride optical mode-size converter," Optical Engineering 63(10), 105106 (24 October 2024). https://doi.org/10.1117/1.OE.63.10.105106
Received: 16 July 2024; Accepted: 26 September 2024; Published: 24 October 2024
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KEYWORDS
Silicon nitride

Waveguides

Particle swarm optimization

Optical transmission

Fabrication

Optical engineering

Silicon

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