Dr. Alexey S. Vishnevskiy Profile

Dr. Alexey S. Vishnevskiy

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 31 January 2022 Paper

A. Rezvanov, A. Miakonkikh, A. Vishnevskiy, D. Seregin, K. Vorotilov, K. Rudenko, M. Baklanov

Proceedings Volume 12157, 1215716 (2022) https://doi.org/10.1117/12.2624608

KEYWORDS: Plasma, Etching, Dielectrics, Carbon, Resistance, Refractive index, Fluorine, Annealing, Argon, Chemical species

Proceedings Article | 30 December 2016 Paper

A. Miakonkikh, I. Clemente, A. Vishnevskiy, K. Rudenko, M. Baklanov

Proceedings Volume 10224, 1022420 (2016) https://doi.org/10.1117/12.2267113

KEYWORDS: Cryogenics, Plasma etching, Plasma, Dielectrics, Etching, Bromine, FT-IR spectroscopy, Polymers, Fluorine, Diffusion

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