Mr. Alok P. Vasudev Profile

Alok P. Vasudev

at Stanford Univ

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Publications (2)

Proceedings Article | 14 May 2004 Paper

Design of dissolution inhibitors for chemically amplified photolithographic systems

Charles Chambers, Shiro Kusumoto, Brian Osborn, Alok Vasudev, Michitaka Ootani, Leonidas Walthal, Hale McMichael, Paul Zimmerman, Willard Conley, C. Grant Willson

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.535941

KEYWORDS: Polymers, Distributed interactive simulations, Absorbance, Photoresist materials, Scanning electron microscopy, Semiconducting wafers, Picture Archiving and Communication System, Glasses, Transparency, Optical lithography

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Proceedings Article | 12 June 2003 Paper

Dissolution inhibitors for 157-nm photolithography

Charles Chambers, Shiro Kusumoto, Guen Su Lee, Alok Vasudev, Leonidas Walthal, Brian Osborn, Paul Zimmerman, Will Conley, C. Grant Willson

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485191

KEYWORDS: Polymers, Distributed interactive simulations, Semiconducting wafers, Photoresist materials, Carbon monoxide, Carbonates, Optical lithography, Lithography, Absorbance, Fluorine

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