Prof. Ampere A. Tseng Profile

Prof. Ampere A. Tseng

at Arizona State Univ

SPIE Involvement:

Author

Publications (4)

SPIE Journal Paper | 1 October 2009

Formation of uniform nanoscale oxide layers assembled by overlapping oxide lines using atomic force microscopy

Ampere Tseng, Tae-Woo Lee, Andrea Notargiacomo, Tupei Chen

JM3, Vol. 8, Issue 04, 043050, (October 2009) https://doi.org/10.1117/12.10.1117/1.3268427

KEYWORDS: Oxides, Atomic force microscopy, Silicon, Nanolithography, Superposition, Humidity, Molecular assembly, Reliability, Surface roughness, Oxidation

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SPIE Journal Paper | 1 October 2006

Effects of surface roughness and contact pressure on wafer bonding strength using transmission laser bonding technique

Ampere Tseng, Jong-Seung Park

JM3, Vol. 5, Issue 04, 043013, (October 2006) https://doi.org/10.1117/12.10.1117/1.2397088

KEYWORDS: Silicon, Surface roughness, Semiconducting wafers, Glasses, Interfaces, Wafer bonding, Diffusion, Laser bonding, Surface finishing, Silicon carbide

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SPIE Journal Paper | 1 July 2002

Electron beam lithography of microbowtie structures for next-generation optical probe

Ampere Tseng, Chii Chen, C. Wu, Rodolfo Diaz, Michael Watts

JM3, Vol. 1, Issue 02, (July 2002) https://doi.org/10.1117/12.10.1117/1.1479707

KEYWORDS: Electron beam lithography, Near field optics, Glasses, Coating, Computer aided design, Germanium, Near field, Photoresist processing, Polymethylmethacrylate, Diffraction

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Proceedings Article | 1 July 2002 Paper

Fabrication of microbowtie structures using electron-beam lithography for a new optical probe

Ampere Tseng, Chii Chen, C. Wu, Rodolfo Diaz

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472357

KEYWORDS: Near field optics, Glasses, Computer aided design, Electron beam lithography, Lithography, Coating, Electron beams, Scattering, Near field, Inspection

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